TOKYO ELECTRON LIMITED

Announcement on Personnel Changes

Tokyo Electron Limited announces that the following personnel changes have been decided.

1. Personnel Change for Corporate Director
Takaaki Matsuoka, Corporate Director, tendered his resignation as Corporate Director, for his health reasons
on April 30th, 2014.

Name New Position Current Position
Takaaki
Matsuoka
Corporate Consultant,
 Tokyo Electron Ltd.
Corporate Director,
 Tokyo Electron Ltd.
Corporate Director,
 Tokyo Electron Miyagi Ltd.
Board of Director,
 TEL Venture Capital, Inc.
Board of Director,
 TEL Solar AG


2. Personnel Changes for Representative Director of Subsidiaries Effective on July 1st, 2014

Name Continuing Position* New Position Current Position
Tetsuo
Tsuneishi
Vice Chairman of the Board,
 Tokyo Electron Ltd.
Chairman,
 Tokyo Electron America, Inc.
Chairman,
 Tokyo Electron Europe Ltd.
-
Kiyoshi
Sato
Corporate Consultant,
 Tokyo Electron Ltd.
Senior Corporate Advisor,
 Tokyo Electron Europe Ltd.
Board of Director,
 Tokyo Electron U.S. Holdings, Inc.
Chairman,
 Tokyo Electron America, Inc.
Chairman,
 Tokyo Electron Europe Ltd.


3. Personnel Change for Director of Subsidiary Effective on May 1st, 2014

Name Continuing Position* New Position Current Position
Shigetoshi
Hosaka
SVP,
 Tokyo Electron Ltd.
Board of Director,
 TEL Venture Capital, Inc.
-

*Some Continuing Positions in subsidiaries are abbreviated.