TOKYO ELECTRON LIMITED

Announcement on Partial Changes in the Organization and Personnel Changes

The following partial changes in the organization and personnel changes have been decided.

1. Partial Changes in the Organization Effective on April 1st, 2014
(i)“PVE Engineering Dept.” and “PVE Technology Development Dept.” in “PVE Division” will be merged to “PVE Engineering Dept.”.
(ii)“Field Solutions 1st Dept.” and “Field Solutions 2nd Dept.” in “FSBU” will be merged to “Field Solutions Dept.”.

2.Personnel Changes in Corporate Director and Executive Officer Effective on April 1st, 2014

NameContinuing Position*New PositionCurrent Position
Kenji
Washino
Corporate Director
Vice President, Corporate
 Development Division,
 ATS/FPD/PVE
General Manager, PVE
Director, PVE Sales Dept.
 PVE Engineering Dept.
Shinichi
Sasahara
Vice PresidentGeneral Manager, PVE
Director, PVE Sales Dept.
General Manager, FPD sales
Tsuguhiko
Matsuura
Vice President
 General Manager, FPD BU
Director,
 Organic EL Project Dept.
General Manager, FPD
 Sales

*Some Continuing Positions of Subsidiary's Board of Director are abbreviated.

3. Other Personnel Changes Effective on April 1st, 2014

NameContinuing Position*New PositionCurrent Position
Hiroaki
Hayashi
Director, PVE Engineering Dept.Director, PVE Technology
 Development Dept.
Fumihiko
Kaminaga
Director, Field Solutions Dept.Director, Field Solutions
 1st Dept.
Takeshi
Kawamoto
Director, Field Solutions
 2nd Dept.