Announcement on Personnel Changes
Tokyo Electron Limited announces that the following personnel changes have been decided.
1. Personnel Changes of Directors and Executive Officers Effective on March 1st, 2014
| Name | New Position | Continuing Position* | Current Position |
| Kenji Washino | Vice President, Corporate Development Division, ATS/FPD/PVE General Manager, PVE Division | Corporate Director | Executive Vice President, Corporate Development Division, ATS/FPD/PVE |
| Takashi Ito | Senior Manager, PVE Division | － | Senior Vice President General Manager, PVE Division |
*Some Continuing Positions of Subsidiary's Board of Director are abbreviated.
2. Other Personnel Changes Effective on March 1st, 2014
| Name | New Position | Continuing Position | Current Position |
| Daisuke Matsunaga | PVE Division | － | Deputy General Manager, PVE Division |
| Hiroshi Ishida | Vice President, TEL Solar AG | － | Senior Vice President, TEL Solar AG |
| Shigeki Nakatani | PVE Division | － | Director, PVE Sales Dept. |
| Soichiro Kori | PVE Division | － | Director, PVE Engineering Dept. |
3. Personnel Changes of Executive Officers Effective on April 1st, 2014
| Name | New Position | Continuing Position | Current Position |
| Chiaki Yamaguchi | Corporate Consultant | － | Senior Vice President General Manager, SPE Sales Division Vice Chairman, Tokyo Electron (Shanghai) Ltd. Vice Chairman, Tokyo Electron (Shanghai) Logistic Center Ltd. |
| Yoshiaki Horii | Vice President General Manager, SPE Sales Division | General Manager, North America and Europe Sales | Deputy General Manager, SPE Sales Division |
