TOKYO ELECTRON LIMITED

Announcement on Important Personnel Change

The following important personnel change has been decided.

1. Important Personnel Change of Director of Tokyo Electron Effective on February 1, 2014

NameContinuing Position*New PositionCurrent Position
Hirofumi
Kitayama
Senior Executive Vice President,
 Representative Director, Business Ethics
 Production and Technology,
 System Development Division, IT
 General Manager,
 Production Division(Quality)
Director, CSR Promotion