TOKYO ELECTRON LIMITED

Tokyo Electron Announces Changes in Corporate Director and Audit & Supervisory Board Member

Tokyo Electron Limited announced that its Board of Directors had decided on the list of candidates for Corporate Director and Audit & Supervisory Board Member on April 30, 2013. The official decision on these matters will be made at the Annual General Meeting of Shareholders, held on June.

1. Eleven Candidates for Corporate Director
Tetsuro Higashi
Tetsuo Tsuneishi
Hirofumi Kitayama
Kiyoshi Sato
Kenji Washino
Hikaru Ito
Takaaki Matsuoka
Yoshiteru Harada
Tetsuro Hori (currently VP & General Manager, Tokyo Electron Ltd.)
Hiroshi Inoue (Outside Director)
Masahiro Sakane (Outside Director)

2. Two Candidates for Audit & Supervisory Board Member
Mikio Akaishi (currently Statutory Auditor, Gecoss Corporation)
Takatoshi Yamamoto (currently Corporate Auditor, Fuji Heavy Industries Ltd.)

3. Resignation from Corporate Director
Hiroshi Takenaka (to be appointed as Senior Corporate Consultant, Tokyo Electron Ltd.)
Takashi Nakamura
Masami Akimoto
Hideyuki Tsutsumi

4. Resignation from Audit & Supervisory Board Member
Togo Tajika