TOKYO ELECTRON LIMITED

Notice Concerning Payment of Dividends from Surplus Earnings

Tokyo Electron Limited (TEL) announces that on May 13, 2011, the company’s Board of Directors passed a resolution to pay dividends (year-end dividends) from surplus earnings to shareholders of record as of March 31, 2011. In addition, there are no changes that we announced on April 28, 2011.

1. Details of Dividend Payments

  Amount Most recent dividends
forecast
Dividends paid in
previous fiscal year
Shareholder
registration date
March 31, 2011 March 31, 2011 March 31, 2010
Dividends per share 76 yen 76 yen 8 yen
Total dividends paid 13,608 million yen 13,608 million yen 1,431 million yen
Date dividends start to be paid May 27, 2011 May 27, 2011 May 28, 2010
Source of funds to
pay dividends
Surplus earnings - Surplus earnings


(Reference) Breakdown of Dividends Paid for Year

  Dividends per share
Shareholder registration date End of interim period End of fiscal year Total annual dividends
Dividends paid in current fiscal year 38 yen 76 yen 114 yen
Dividends paid in previous fiscal
year(ended March 2010)
4 yen 8 yen 12 yen