1960's
The site of TEL's birth: The TBS Akasaka office
TEL-Thermco Engineering Co., Ltd. begins domestic production of diffusion furnaces
TEL-Thermco Engineering Co., Ltd. develops the world's first high-pressure oxidation furnace
First SEMICON Japan event held
1970's
1980's
Listed on the Second Section of the Tokyo Stock Exchange
TEL Varian Ltd. established, making possible domestic production of ion implantation devices
Completion of Central Research Laboratory in the Hosaka Industrial Estate in Nirasaki City, Yamanashi Prefecture
Completion of the Process Technology Center for the 300mm wafer in the Hosaka District, Yamanashi
TEL receives Tokyo Stock Exchange's Fourth Annual Award for Excellence in Disclosure
1990's
2000's
SEMI creates "SEMI Akira Inoue Award" in recognition of Akira Inoue's activities for environmental measures in the semiconductor industry
Participation in Albany NanoTech Program for industry-academia joint research promotion and support
TEL Receives Prime Minister's Award for its Contribution to Industry-Academia-Government Collaboration
Tokyo Electron Miyagi Ltd. is established (Taiwa office)
Re-emergence as New TEL (Vision, Medium-term Management Plan formulated and new Corporate Logo created)
Tokyo Electron makes Thomson Reuters' (Current Clarivate) 2014 Top 100 Global Innovators List
TEL introduces E-COMPASS, a Supply Chain Initiative for the Environment
TEL wins Grand Prize for Corporate Governance of the Year® 2021
2010's〜