Test Systems

What is a test system?

Hundreds to thousands of integrated circuits (ICs) are constructed on a wafer through various processes during the manufacturing of semiconductors. A test system examines whether the IC formed on a wafer functions properly as a product. TEL's main test system product, the wafer prober, enables electrical testing by connecting it to a tester and contacting the probe needles to IC electrodes on the wafer. In order to enable measurement at the IC chip's guaranteed product temperature, it is equipped with advanced functions to fulfill various requirements such as accurate control of the ambient temperature (chuck temperature) from high temperatures (300, 150℃) through to low temperatures (-55℃).

Products

Wafer Prober
Precio nano/Precio

Wafer Prober
Precio octo

Wafer/Dicing Frame Prober
WDF 12DP

High-speed Probe Mark Automatic Inspection System
TELPADS -O

Data Management System for Wafer Prober
PN-300

Operation Support System for Wafer Prober
N-PAF

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Precio, Precio nano, Precio octo, WDF and TELPADS are registered trademarks or trademarks of Tokyo Electron Limited in Japan and/or other countries.

Products

  • Semiconductor Production Equipment
    • Thermal Processing
    • Coater/Developers
    • Etch Systems
    • Surface Preparation Systems
    • Single Wafer Deposition
    • Test Systems
    • Wafer Bonding/Debonding
    • SiC Epitaxial CVD System
    • Gas Cluster Ion Beam System
    • Advanced Packaging
  • Flat Panel Display Equipment
    • FPD Coater/Developers
    • FPD Etch/Ash Systems
  • Field Solutions
  • Electronic Components
  • Chip Making Process