Thermal Processing

TELINDY PLUS

The TELINDY PLUS is further performance enhancement of TELINDY with increased mass productiveness in the short TAT thermal processing system field, a new segment created by TELFORMULA. Adoption of the wafer transfer mechanism and introducing a new framework, it has improved both the productivity and the air tightness of the wafer standby area.

Features

High performance (125 wafer specification, FTPS heater, short TAT, etc.)
Thin film controllability and high quality at a low temperature (TELINDY PLUSTM, IRadTM, ALD, SiN)
Low particle performance achieved through dry gas cleaning
Improved maintenance through revision of the unit installation structure

Applications

CVD SiO2, SiN, Si (Poly Si, a-Si)
ALD SiO2, SiN
ALD High-k
Thermal oxidation, radical oxidation, annealing
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TELINDY,TELINDY PLUS,TELFORMULA,IRad and FTPS are registered trademarks or trademarks of Tokyo Electron Limited in Japan and/or other countries.

Semiconductor Production Equipment : Thermal Processing

Products

  • Semiconductor Production Equipment
    • Thermal Processing
    • Coater/Developers
    • Etch Systems
    • Surface Preparation Systems
    • Single Wafer Deposition
    • Test Systems
    • Wafer Bonding/Debonding
    • SiC Epitaxial CVD System
    • Gas Cluster Ion Beam System
    • Advanced Packaging
  • Flat Panel Display Equipment
    • FPD Coater/Developers
    • FPD Etch/Ash Systems
    • Inkjet printing system for manufacturing OLED panels
  • Field Solutions
  • Chip Making Process