The TELINDY PLUS is further performance enhancement of TELINDY with increased mass productiveness in the short TAT thermal processing system field, a new segment created by TELFORMULA. Adoption of the wafer transfer mechanism and introducing a new framework, it has improved both the productivity and the air tightness of the wafer standby area.
- High performance (125 wafer specification, FTPS heater, short TAT, etc.)
- Thin film controllability and high quality at a low temperature (TELINDY PLUSTM, IRadTM, ALD, SiN)
- Low particle performance achieved through dry gas cleaning
- Improved maintenance through revision of the unit installation structure
- CVD SiO2, SiN, Si (Poly Si, a-Si)
- ALD SiO2, SiN
- ALD High-k
- Thermal oxidation, radical oxidation, annealing
- TELINDY,TELINDY PLUS,TELFORMULA,IRad and FTPS are registered trademarks or trademarks of Tokyo Electron Limited in Japan and/or other countries.
Semiconductor Production Equipment : Thermal Processing