Tactras is the latest etching system and is capable of the continuous vacuum transfer of 300-mm wafers. It saves energy and has achieved footprint reduction and throughput improvement equivalent to and greater than the Telius SP. It can also support up to 6 process chambers and possesses superior scalability and productivity.

Features

Can be fitted with Vigus, Vesta, RLSA, UD, and FAVIAS chambers

Supports up to 6 chambers

Achieves high throughput, compact design, and low CoO

Ease of maintenance

Applications

High-aspect ratio contact, capacitor

Mask for double patterning

Low-k dual damascene

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Tactras, Telius, Vigus, Vesta, RLSA and FAVIAS are registered trademarks or trademarks of Tokyo Electron Limited in Japan and/or other countries.

Semiconductor Production Equipment : Etch Systems