Tactras is the latest etching system and is capable of the continuous vacuum transfer of 300-mm wafers. It saves energy and has achieved footprint reduction and throughput improvement equivalent to and greater than the Telius SP. It can also support up to 6 process chambers and possesses superior scalability and productivity.
- Can be fitted with Vigus, Vesta, RLSA, UD, and FAVIAS chambers
- Supports up to 6 chambers
- Achieves high throughput, compact design, and low CoO
- Ease of maintenance
- High-aspect ratio contact, capacitor
- Mask for double patterning
- Low-k dual damascene
- Tactras, Telius, Vigus, Vesta, RLSA and FAVIAS are registered trademarks or trademarks of Tokyo Electron Limited in Japan and/or other countries.
Semiconductor Production Equipment : Etch Systems