What is coater/developer?

In a process similar to creating photographic prints, a microscopic circuitry pattern is projected onto the wafer that has been coated with a light-sensitive chemical. Like camera film, the wafer is then developed, leaving behind a stenciled pattern of photoresist to define the areas on the wafer that will be affected by the remaining steps in the transistor cycle. The light-sensitive material, called resist, is deposited by coater/developer. This process is repeated-and a new circuitry pattern is used-each time another layer of the chip is built.

CLEAN TRACK, LITHIUS Pro and CLEAN TRACK ACT are registered trademarks or trademarks of Tokyo Electron Limited in Japan and/or other countries.


  • Semiconductor Production Equipment
    • Thermal Processing
    • Coater/Developers
    • Etch system
    • Surface Preparation system
    • Single Wafer Deposition
    • Test system
    • Wafer Bonding/Debonding
    • SiC Epitaxial CVD System
    • Gas Cluster Ion Beam System
    • Advanced Packaging
  • Flat Panel Display Equipment
    • FPD Coater/Developer
    • FPD Etch/Ash system
    • Inkjet printing system for manufacturing OLED panels
  • Field Solutions
  • Chip Making Process