What are coater/developers?

In a process similar to creating photographic prints, a microscopic circuitry pattern is projected onto the wafer that has been coated with a light-sensitive chemical. Like camera film, the wafer is then developed, leaving behind a stenciled pattern of photoresist to define the areas on the wafer that will be affected by the remaining steps in the transistor cycle. The light-sensitive material, called resist, is deposited by coater/developers. This process is repeated-and a new circuitry pattern is used-each time another layer of the chip is built.

Products

Coater/Developers
CLEAN TRACK
LITHIUS Pro V /
LITHIUS Pro V-i

Coater/Developers
CLEAN TRACK
LITHIUS Pro /
LITHIUS Pro-i

Coater/Developers
CLEAN TRACK
LITHIUS / LITHIUS i+

Coater/Developers
CLEAN TRACK ACT 12 / CLEAN TRACK ACT 8

SOD Coater
CLEAN TRACK ACT 12 SOD / CLEAN TRACK ACT 8 SOD

Photomask Coater/Developer
CLEAN TRACK ACT M

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CLEAN TRACK, LITHIUS Pro and CLEAN TRACK ACT are registered trademarks or trademarks of Tokyo Electron Limited in Japan and/or other countries.