The CLEAN TRACK ACT 12 and ACT 8 are coater/developers that support 300-mm/200-mm wafer processing. They enable stable, high-level processing and smooth development from R&D through to mass production. During in-line processing, the footprint can be reduced to a size equivalent to existing systems, while high-speed transport accomplishes a high throughput. Uptime has been improved by increasing the reliability of each component and simplifying maintenance. In addition, a chemical filter and a high-accuracy oven are used to support DUV processing.