Announcement on Establishment of Subsidiary

Tokyo Electron Ltd. has announced its decision to establish a subsidiary as detailed below.

1. Purpose of establishment
Tokyo Electron has decided to begin work on construction of a new plant in Miyagi Prefecture as detailed in the press release dated January 22, 2010 (Tokyo Electron Announces Construction of New Miyagi Plant). The aim of the new plant is to shorten development times and improve productivity for high added-value products by introducing new production techniques and establishing structures to integrate development and production of semiconductor etch systems, expected to be a growth market in the future. The decision to establish a new subsidiary is aimed at enhancing etch system operations at the new plant.
According to plans, the new subsidiary will be established in July 2010, to begin preparations for the new plant startup, and, after taking over the relevant operations of Tokyo Electron AT Limited, will begin operation of the new plant following its completion in spring 2011 or later.

2. Outline of New Subsidiary Company name: Tokyo Electron Miyagi Limited
Location: Taiwa, Kurokawa District, Miyagi Prefecture
Representation: Hirofumi Kitayama
Main business activities: Development, manufacture of semiconductor production equipment
Capital：　100 million yen
Date of incorporation：July 2010 (scheduled)
Shareholder and ownership percentage：Tokyo Electron Limited 100%

3. Future Outlook
Establishing the new subsidiary is not expected to have a significant effect on the consolidated and non-consolidated performance of Tokyo Electron.