TOKYO ELECTRON LIMITED

IITC2021

Event Summary

Date

2021.07.06 - 2021.07.09

Location

virtual conference

Target

Tokyo Electron (TEL) is proud to be a sponsor of the 2021 IEEE International Interconnect Technology Conference (IITC) will be held virtually on July 6-9. The conference will focus on the interconnect technologies such as advanced metallization and 3D integration technologies for ULSI IC applications. TEL and collaborators will give two presentations.

Advanced Air Gap Formation Scheme Using Volatile Material