TOKYO ELECTRON LIMITED

239th ECS Meeting

Event Summary

Date

2021.05.30 - 2021.06.03

Location

virtual conference

Target

Device Engineer Process Engineer

The 239th ECS Meeting will be held virtually on May 30-June 3. Researchers from universities and companies leading research of electrochemistry and solid-state physics / chemistry will participate to discuss the latest research results. Tokyo Electron (TEL) will give four reports. We very much hope you will be able to join us for this event.

Invited Electrical Performance Improvement in 300mm Ge-Based Devices

Materials and Process Technologies for Scaling BEOL Interconnect Technology

Plasma Oxygen Interaction with Organic Polymer Films: a Mechanistic Study