Technical Committee on Silicon Device and Materials (SDM)
Event Summary
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Date
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2020.10.22 - 2020.10.22
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Location
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virtual conference
The Technical Committee on Silicon Devices and Materials (SDM) will be held as an online virtual conference, on October 22. The theme of this month is "Process Science and New Process Technology". Tokyo Electron (TEL) will give online presentations with detailed explanation about the processing technology of the atomic layer order, which is necessary for scaling. Furthermore collaborators will make a presentation titled “Modification of states of copper and copper oxide due to IPA treatment”.
Memorial Lecture
Atomic layer controlled etching process using plasma
S. Kumakura, M. Honda (Tokyo Electron Miyagi Ltd.)
Modification of states of copper and copper oxide due to IPA treatment
T.Mawaki*1,A.Teramoto*2,K.Ishii*3,Y.Shiba*1,T.Suwa*1,S.Azumo*2,A.Shimizu*2,K.Umezawa*2,R.Kuroda*1,
Y.Shirai*1,S.Sugawa*1
*1 Tohoku University
*2 Hiroshima University
*3 Tokyo Electron Technology Solutions Ltd.
