The 73rd Annual Gaseous Electronics Conference
Event Summary
-
Date
-
2020.10.05 - 2020.10.09
-
Location
-
virtual conference
The 73rd Annual Gaseous Electronics Conference will be held as an online conference, on October 5-9. Active discussions will focus on fundamental research and advanced topics related on plasma. Tokyo Electron (TEL) will have the honor of participating in three research results including an invited talk, titled “Advancements in Feature Scale Simulations”. Join and inspired at the online conference as watching a great presentation from TEL.
The GEC encourages all students to submit applications for the Student Awards.
Invited talksAdvancements in Feature Scale Simulations
M.Paul (TEL Technology Center, America, LLC)
Analysis of Reaction and Decomposition of Isopropyl Alcohol on Copper and Copper Oxide Surfaces Toward Area-selective Processes
J.Shinagawa *1, P.Ventzek*1, Y.Tamakawa*2, H.Mochiki*2, N.Yokomori*3
*1Tokyo Electron America, Inc.
*2Tokyo Electron Miyagi Ltd.
*3Tokyo Electron Ltd.
Pairing plasma diagnostics, theory and simulations with machine learning to overcome the limitations of big data analytics in complex plasma processes
J.Shinagawa *1, P.Ventzek*1, Y.Tamakawa*2, H.Mochiki*2, N.Yokomori*3
*1Tokyo Electron America, Inc.
*2Tokyo Electron Miyagi Ltd.
*3Tokyo Electron Ltd.
