2019 Symposia on VLSI Technology and Circuits
Event Summary
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Date
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2019.06.09 - 2019.06.14
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Location
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Kyoto
Symposia on VLSI Technology and Circuits will be held at Kyoto, Japan, June 9 - 14, 2019. The Symposia is one of the most famous conferences on leading-edge semiconductor technology and circuits. Tokyo Electron(TEL) will make oral presentations on Selective and Self-Limited Thin Film Processes in "Sunday Workshop" and "Short Course."
Selective and Self-Limited Thin Film Processes for the Atomic Scale Era
R. Clark (TEL Technology Center, America, LCC)
[Sunday Workshop 1 (June 9th)]
Advanced Process Technologies Required for Future Scaling and Devices
R. Clark (TEL Technology Center, America, LCC)
[Short Course 1 (June 10th)]
