IITC 2019
Event Summary
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Date
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2019.06.03 - 2019.06.06
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Location
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Belgium（Brussels）
International Interconnect Technology Conference (IITC 2019) will be held as a joint conference with the Materials for Advanced Metallization Conference (MAM 2019) at Brussels, Belgium, June 3–6, 2019. The interconnect technology such as advanced metallization and 3D integration for ULSI applications will be discussed in the conference. Tokyo Electron (TEL) will make an oral presentation for that scope.
Novel Volatile Film for Precise Dual Damascene Fabrication
M. Fujikawa*1, T Yamaguchi*1, S. Nozawa*1, Y. Kikuchi*2, K. Maekawa*2, and H.Kawasaki*3
*1 Tokyo Electron Technology Solutions Limited
*2 TEL Technology Center, America, LCC
*3 Tokyo Electron Limited
