The 66th JSAP Spring Meeting, 2019
Event Summary
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Date
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2019.03.09 - 2019.03.12
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Location
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Japan
The JSAP Spring Meeting will be held March 9-12 in Japan, and various academic topics will be actively discussed. Tokyo Electron (TEL) will present three topics about the latest semiconductor manufacturing technologies and their future prospects. (One keynote speech, and two invited talks.)
Latest trends of leading etch technology and future prospects
Masanobu Honda, Takayuki Katsunuma, Toru Hisamatsu, Yoshihide Kihara(Tokyo Electron Miyagi Ltd.)
