FPD Coater/Developer Series
Featuring the world’s first and the finest Air Floating Coater unit for large substrates
During the FPD array process, a coater/developer coats and develops photoresist on a glass substrate. In a process similar to creating photographic prints, a microscopic circuitry pattern is projected onto the glass substrate that has been coated with photoresist. This process is called the photolithography process, which is repeated several times during the array process to build complex TFT (Thin Film Transistor) circuit on a glass substrate. TEL’s FPD Coater/Developers have gained the confidence of customers worldwide for outstanding reliability and productivity for large-area display manufacturing.
Exceliner™ is a coater/developer system, and significant features are optimized to handle and process large substrates for superior productivity and stable performance for 6th to “worldwide No1 share” 10.5th generation.
TAC is TEL’s original worldwide first Air Floating Coater unit, achieving high throughput and MURA less coating.
Exceliner™ realizes excellent productivity, yield, up-time, running cost for various processes of photo-resist and organic materials, acryl, and polyimide.
Equipped with Air Floating Coater (TAC)
Flat transfer concept system
1,500mm x 1,850mm
2,200mm x 2,500mm
2,940mm x 3,370mm
Exceliner is registered trademark or trademark of Tokyo Electron Limited in Japan and/or other countries.