FPD Coater/Developer Series
Featuring the world’s first and the finest Air Floating Coater unit for large substrates
During the FPD array process, a coater/developer coats and develops photoresist on a glass substrate. In a process similar to creating photographic prints, a microscopic circuitry pattern is projected onto the glass substrate that has been coated with photoresist. This process is called the photolithography process, which is repeated several times during the array process to build complex TFT (Thin Film Transistor) circuit on a glass substrate. TEL’s FPD Coater/Developers have gained the confidence of customers worldwide for outstanding reliability and productivity for large-area display manufacturing.
Exceliner™ is a coater/developer system for the 6th to 10.5th generation, which can be combined with other equipment such as exposure, edge exposure and inspection tools. It has worldwide No.1 market share with significant features optimized to handle and process large substrates for superior productivity and stable performance. TAC is TEL’s original Air Floating Coater unit which was the world‘s first FPD array mass production system ever released, achieving high throughput and excellent film uniformity.
Besides photo-resist, Exceliner™ is applicable to organic materials such as acryl and polyimide.
Equipped with Air Floating Coater (TAC)
Flat transfer concept system
1,500mm x 1,850mm
2,200mm x 2,500mm
2,940mm x 3,370mm
Exceliner is registered trademark or trademark of Tokyo Electron Limited in Japan and/or other countries.