Dec 7, 2018
Tokyo Electron (TEL) is pleased to announce the release of its MERCURY™+ batch spray cleaning system. MERCURY+ includes a new, advanced control system that ensures that a proven technology, with over 1,000 systems installed worldwide, will continue to be a solution for years to come.
Supporting 75mm – 200mm wafers, the MERCURY+ addresses the industry’s need for a lower-cost batch spray solution. The new MERCURY control system includes replacements for obsolete components such as a new CPU, touchscreen interface, pneumatic card rack, input-output interface and motor speed controller. In addition, the new control system extends the system’s functionality with additional monitoring, data logging and maintenance functions, and is capable of running standard MERCURY processes without the need for requalification. Built in to all new MERCURY+ systems, the new control system can now be ordered as a field upgrade for any MERCURY MP system.
Toshihiko Nishigaki, President of TEL FSI stated, “We are excited about the new growth in this market segment and our immediate ability to provide customers the right solution with this enhancement of our industry proven MERCURY systems.”
TEL’s batch spray systems are process-optimized cleaning tools that allow you to become highly flexible and productive – replacing the buildup and mess of dated ashers, wet bench stations, and peripheral rinsing/drying equipment with a single tool that etches, strips and cleans in one safe, space-conscious footprint.
Please visit us at the TEL booth #4544, East Hall 4 at SEMICON Japan, or contact your TEL account manager to learn how TEL batch spray cleaning solutions are ideally suited for today’s Internet of Things (IoT) marketplace, and provide solutions to maximize yields, minimize excursions and downtime, and boost productivity.
MERCURY is trademarks or registered trademarks of TEL FSI, Inc. in Japan and/or other countries.