Tokyo Electron Begins Accepting Orders for the Certas LEAGA™, a High Productivity Dry Cleaning System
TOKYO -- Tokyo Electron Limited (TEL) today announced that the company begins accepting orders for Certas LEAGATM, a high productivity dry cleaning system in January 2015.
Building on the basic performance of the Certas WINGTM system released in 2010, the highly productive Certas LEAGA is capable of handling a wide variety of processing needs of advanced design nodes on a single platform. Designed for volume production applications incorporating current and next-generation scaling processes, the Certas LEAGA features improved productivity with modular processing units that can be freely reconfigured to optimize the tool for the application at hand.
The Certas LEAGA system's newly designed dual-wafer vacuum transfer arms allow up to six chambers to be clustered on a small-footprint, high-throughput platform while retaining virtually the same process chamber configuration as the Certas WING system.
Based on the proven dry processing technology of the Certas series, which employs reactive gases, the Certas LEAGA enables finer control over interfacial cleaning, and also offers a range of selectivity from zero to a high level in order to meet the broad range of needs of silicon oxide etch processes.
"The Certas LEAGA system maintains superior controllability unique to the dry cleaning process while responding to our customers' demand for higher productivity," said Toshiki Kawai, VP & General Manager of SPSBU at TEL. "We are confident that these advantages will significantly boost the productivity of manufacturing next-generation devices, which are increasingly becoming smaller in scale and more vertical. TEL will continue to provide technologically superior products to extend our lead in the field of cleaning systems where further innovations are forthcoming."
*Certas, Certas Wing and Certas LEAGA are registered trademarks or trademarks of Tokyo Electron Limited in Japan and other countries.