Jul 19, 2011
TEL Probus-SiC™ Wins Grand Prize at 17th Semiconductor of the Year Awards
Tokyo Electron Limited (TEL) announced that its Probus-SiC™, silicon carbide (SiC) epitaxial film growth tool won the grand prize in the semiconductor production equipment category of the 17th Semiconductor of the Year Awards sponsored by The Semiconductor Industry News.
The Semiconductor of the Year Awards have been held every year since 1994 by The Semiconductor Industry News, an industry publication issued by Sangyo Times, Inc. Winning products and technologies are selected by Semiconductor Industry News journalists based on factors such as development innovation, creation of mass production systems, benefits to society and future potential.
The Probus-SiC is a tool for growing SiC epitaxial film on SiC substrates that facilitates high-productivity growth of high-quality epitaxial films. The Probus-SiC took out the grand prize from among the 54 products nominated in the semiconductor production equipment category in recognition of its innovativeness as the industrys first SiC special-purpose tool and its growth potential.
SiC devices are attracting attention as next-generation power devices, and new markets are expected to develop in the future.