Improving Product Safety

Safe Equipment Design

Tokyo Electron(TEL) carries out product risk assessments as early as possible in the development phase, taking the entire product life cycle into consideration. Based on the results of these assessments, we implement intrinsically safe equipment design*1 to reduce the risks posed to humans. We also examine and ensure compliance with increasingly challenging laws and regulations around the globe and create systems for abiding by all safety regulations of the regions where our equipment is shipped. Equipment shipped from our factories is checked by a third-party inspection organization to ensure it complies with SEMI S2*2 international safety standards. For equipment requiring CE marking,*3 we acquire a Certificate of Conformity (CoC) issued by Notified Body (NB) stating conformity with the Machinery Directive and EMC Directive.*4

*1 Safe equipment design: Innovative machinery designs that eliminate causes of machinery-related hazards posed to humans
*2 SEMI S2: The Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment is a set of guidelines for safe design of equipment. It is used mainly by the leading manufacturers of semiconductor equipment in the United States and Europe, not only for ICs but also as safe procurement guidelines for electric and electronic device manufacturing equipment around the world.
*3 CE marking: When exporting into the European Union, CE marking defines rules for displaying a CE mark as proof that the equipment is safe and complies with EU-defined rules (Directives)
*4 EMC Directive: One of the New Approach Directives that apply to the 27 EU member states. This directive applies to all electric or electronic devices that are at risk of being disturbed by electromagnetic interference or that may interfere with other equipment. The current directive is 2014/30/EU.

Safety Education

In recent years, it has become increasingly important for TEL to ensure compliance with international safety standards and guidelines early in the equipment design and development processes. Since fiscal year 2008, TEL has been offering its engineers web-based training on safe equipment design. Through risk assessment exercises and examples of actual accidents, the participants acquire basic safety knowledge for equipment design. In fiscal year 2016, we revised the education program using updated information, including new safety standards. In addition to the training for design engineers, we are also promoting equipment safety education for all workers in areas such as manufacturing, start-up, service, and on-site logistics. This allows these employees to apply the knowledge to the handling of equipment as well as assist in the development of safer equipment. From fiscal year 2017, lectures and training by outside experts are provided.