What is Thermal Processing?

In a heated LP-CVD (Chemical Vapor Deposition) or oxidation process, a very thin layer is deposited for transistor gate and surrounding of those structure fabrication. Also ALD technologies are adopted for further nano-scaling and deep trench pattern. While adopting the merits of the existing hot-wall system, Tokyo Electron offers a highly reliable system capable of high-speed heat processing.

Products

Thermal Processing System
TELFORMULA

Thermal Processing System
TELINDY PLUS

Plasma-Enhanced Batch Thermal ALD System
TELINDY PLUS IRad

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TELFORMULA,TELINDY PLUS and IRad are registered trademarks or trademarks of Tokyo Electron Limited in Japan and/or other countries.