Thermal Processing

What is Thermal Processing?

In a heated LP-CVD (Chemical Vapor Deposition) or oxidation process, a very thin layer is deposited for transistor gate and surrounding of those structure fabrication. Also ALD technologies are adopted for further nano-scaling and deep trench pattern. While adopting the merits of the existing hot-wall system, Tokyo Electron offers a highly reliable system capable of high-speed heat processing.

Products

Thermal Processing System
TELFORMULA

Thermal Processing System
TELINDY PLUS

Plasma-Enhanced Batch Thermal ALD System
TELINDY PLUS IRad

Atomic Layer Deposition System
NT333

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TELFORMULA,TELINDY PLUS,IRad and NT333 are registered trademarks or trademarks of Tokyo Electron Limited in Japan and/or other countries.

Products

  • Semiconductor Production Equipment
    • Thermal Processing
    • Coater/Developers
    • Etch Systems
    • Surface Preparation Systems
    • Single Wafer Deposition
    • Test Systems
    • Wafer Bonding/Debonding
    • SiC Epitaxial CVD System
    • Gas Cluster Ion Beam System
    • Advanced Packaging
  • Flat Panel Display Equipment
    • FPD Coater/Developers
    • FPD Etch/Ash Systems
    • Inkjet printing system for manufacturing OLED panels
  • Field Solutions
  • Chip Making Process