What is single wafer deposition?

Tokyo Electron's single-wafer deposition systems, especially, the latest 300mm platform Triase⁺, use cluster process modules that can be configured for a wide variety of applications. Among these systems TEL's representative process module, the Ti, TiN, and W metal CVD Series utilize the plug formation process and electrode process. The SPA Series extends its performance record by utilizing special hardware to respond to FEOL requirements as a low-temperature plasma processing system. In addition, the High-k CVD Series has been adopted for advanced gate stack processes, and is contributing to the acceleration of device speed and energy saving.

Products

Single Wafer Plasma Treatment System
Triase⁺ SPAi

Single Wafer CVD System
Triase⁺ Ti/TiN

Single Wafer CVD System
Triase⁺ W

Single Wafer CVD System
Triase⁺ High-k CVD

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Trias and Triase⁺ are registered trademarks or trademarks of Tokyo Electron Limited in Japan and/or other countries.