Feb 14, 2012

TEL Joins the CEA-Leti's IMAGINE Program to prepare for the introduction of EB Maskless Lithography

Tokyo Electron(TEL) and CEA-Leti announced that TEL will join “IMAGINE program," which supports the evolution and launch of Electron Beam (EB) high-throughput Maskless Lithography (ML2) technology, developed by MAPPER BV.

“ML2 is a patterning candidate for future semiconductor devices. As a tool supplier, TEL is interested in emerging and promising technologies,” said Toshi Nishigaki, Vice President and General Manager of TEL CTBU. “Leti has gained real expertise in ML2 technology. Through our collaboration to Leti’s programs, we expect further progress in next generation patterning solutions.”

“We have been working with TEL on different fields of microelectronics for many years. The TEL interest in joining development programs on ML2 is a strong message to the industry of the coming maturity of this lithography solution for next advanced nodes,” said Serge Tedesco, CEA-Leti program manager. “The experience carried out by TEL, the worldwide leader coater/developer company will be of great value for the development of next generation lithography solutions developed within the frame of the Leti programs.”

About CEA-Leti
CEA is a French research and technology organization, with activities in four main areas: energy, information technologies, healthcare technologies and defence and security. Within CEA, the Laboratory for Electronics & Information Technology (CEA-Leti) works with companies in order to increase their competitiveness through technological innovation and transfers. CEA-Leti is focused on micro and nanotechnologies and their applications, from wireless devices and systems, to biology and healthcare or photonics. Nanoelectronics and microsystems (MEMS) are at the core of its activities. As a major player in MINATEC campus, CEA-Leti operates 8,000-m² state-of-the-art clean rooms, on 24/7 mode, on 200mm and 300mm wafer standards. With 1,400 employees, CEA-Leti trains more than 190 Ph.D. students and hosts 200 assignees from partner companies. Strongly committed to the creation of value for the industry, CEA-Leti puts a strong emphasis on intellectual property and owns more than 1,700 patent families.