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TELPADS-O

TELPADS-O

High Speed Probe Mark Inspection

TELPADS-O provides throughput improvements of up to 50x compared to current probe mark inspectioniPMIjcapabilities. Integration with TEL's fully automatic wafer prober creates an automated offline PMI solution that allows customers to maximize uptime of the test cell. TEL's automated PMI methodology eliminates the need for manual inspection with a microscope, thereby reducing the need for operator interaction.

Features

  • High Speed engine allows for PMI of all pads and all wafers
  • Capable of providing quantitative data for quality control of probe mark
  • Reduced Operator Interaction
  • Support for various pad types
  • *TELPADS is a registered trademark or a trademark of Tokyo Electron Limited in Japan and other countries.

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