ODP Solution consists of both hardware and software system to support optical critical dimension (scatterometry) metrology.

It is comprised of the ODP Software, TeraGen, and the Profiler Application Server (PAS).

ODP solutions are used in production at leading memory and logic device manufacturers around the world.

It provides customers with the best data integrity, while having the largest application space and the fastest production implementation.

ODP TeraGen offers two proven complementary operating modes: superior run-time regression profiles using ODP NOW, and fast and easy automated on-site library generation using ODP LibGen. Providing both modes empowers customers with the maximum flexibility and control. In addition, TeraGen enables customers to keep all proprietary technology details in-house.

PAS connects optical metrology hardware and networks and processes ODP Libraries to deliver metrology profiles and fault detection for APC. The system runs the ODP scatterometry engine for both stand-alone and integrated metrology hardware. PAS also hosts the Profiler software and handles data communication, measurement process, result generation, results analysis, and result output.