The overall AcuShape Solution is a software and hardware system to support optical critical dimension (scatterometry) metrology.

It is comprised of the AcuShape Software, Acushape Generator, and AcuShape on-tool computer.

AcuShape is used in conjunction with optical metrology hardware to provide a powerful process control solution.

AcuShape Software is used to develop optimized models of critical features on wafers, create libraries reflecting the vast permutation of process variations, and search the libraries on-tool to provide measurement results on complex structures for advanced devices.

AcuShape Generator is the off-line portion of the overall AcuShape Solution. The AcuShape Generator hardware consists of a Modeling Station and a Server Farm. The Modeling Station supports the AcuShape advanced software for fully comprehensive model building. The Server Farm is a powerful computation engine to provide high-speed profile regression and library generation.