AcuShape is the result of collaboration between Tokyo Electron and KLA-Tencor. The strengths of Timbre ODP and KLA-Tencor SpectraSuite products have been combined to create the best-in-class optical critical dimension metrology solution; with the power to model the most advanced semiconductor features, and the speed to deliver rapid results.

AcuShape provides a common platform to support both TEL integrated metrology and KLA-Tencor stand-alone metrology systems.

Optical Digital Profilometry (ODP) technology, developed by Timbre Technologies, provides the capability to produce accurate and precise models, which are the key enablers for production use of scatterometry results for both stand-alone and integrated metrology (IM) applications.

ODP is an industry-leading non-destructive metrology technology that utilizes optical instruments based on spectroscopic ellipsometry or reflectometry to precisely measure critical dimension (CDs), sidewall angles, and multiple layer film thicknesses. The process is executed in-line, which eliminates the need to break the wafer for performing the analyses.