TEL developed the Trias SPAi to reduce greenhouse gas emissions and improve COO through a smaller footprint and higher throughput. It is based on TEL's popular Trias SPA, a low temperature plasma nitridation/oxidation process module installed at major DRAM, Flash and Logic customers worldwide. The Trias SPA creates a high-density, low-electron temperature plasma enabling damage-free processing in advanced radical oxidation and nitridation applications.

• Gate nitridation, STI Liner/Recovery oxidation, Post treatment(High-k, CVD films)

• Reduced electrical power and CO2 emission
• Reduced footprint
• Higher productivity

• *Trias is a registered trademark or a trademark of Tokyo Electron Limited in Japan and other countries.