TEL has been involved in MEMS technology and has been developing MEMS devices for its own use for more than 10 years. This includes extensive process development and prototyping experience. Leveraging this knowledge and its general semiconductor process background, TEL is now offering our expertise as a service to customers. This Process Service (even single process) and Prototyping Service is available from TEL to aid in the development of your MEMS device(s) or technology.

This can include not only new process development for your unique design, but also development of the necessary production equipment to facilitate a fast production ramp.

• 6 inch full process line
• MEMS device prototyping service and volume production support
• Accurate 3-D structure by Lithography and TEL dry etch process
• Process development easily adoptable to volume production
• New tool development matched to specific design
• Substrate attach service as Wafer handling solution
• High-rate Deep Si Etching for through-hole via