The Impressio is multi-chamber plasma etch/ash system, which handles the 7th~10th generation's large-sized substrates in LCD manufacturing lines. The Impressio has been developed to achieve the same etching rate and uniformity as the 6th generation system, by optimizing plasma density and etching efficiency, adopting the ECCP mode.

• Silicon layer
• Insulating layer
• Metal layer
• Ashing

• Substrate size : Impressio
  <Standard> 1950mm×2250mm
                    2160mm×2460mm
                    2850mm×3050mm
• Multi-chamber system : Max 3 Chamber
• Chamber mode : ECCP mode
• P/C Open/Close : Slide & rotation (TEL original)

• *Impressio is a trademark of Tokyo Electron Limited in Japan, Korea and Taiwan.