The CLEAN TRACK ACT 12 SOD / 8 SOD are 300mm and 200mm coat, bake, and cure tools for spin-on dielectric materials. TEL has developed innovative modules to process organic, inorganic, hybrid and porous materials. Single wafer in-line cure processing is accomplished with TEL's implementation of low oxygen hotplate technology. For high-throughput low-oxygen cure applications, TEL developed a dedicated array of cure modules integrated within the CLEAN TRACK ACT platform.

• Spin-on coating process for IMD�iinter-metal dielectric�j, STI�ishallow trench isolation�j, Sacrificial layer, etc.

• High productivity, high throughput, compact footprint
• Low oxygen bake and cure capability
• Single wafer, in-line cure process
• Supports SMIF interface

• *CLEAN TRACK ACT is a registered trademark or a trademark of Tokyo Electron Limited in Japan and other countries.
• *Please refer to P17 for Timbre's optical measurement system.