The CS Series of FPD coater/developers realizes high process performance and cost efficiency. The CS Series supports AGV/CIM, making it easy to introduce factory automation. It can be integrated with the CS series, as well as exposure systems and other peripheral equipment, such as a titler and edge exposure into an inline system. Line integration is our solution for FPD manufacturers. To reduce costs, a method of decreasing resist and developing fluids consumption has been implemented. The CS series can be connected to the recycle (mixing) system.

• Positive photoresist (coater/developer)
• CFPhotoresist (coater/developer)
• Organic layer (coater/developer)
• Polyimide (coater)

• Substrate size : CS1000SH<Standard> 730mm x 920mm
                          CS810S    <Standard> 600mm x 720mm                         CS810L    <Standard> 680mm x 880mm
• Reduced footprint by common transfer machine
• High process performance and high throughput
• Flexible system layout
• High system reliability