The Exceliner has dramatically changed coating, development and oven units to correspond with the 7th~10th generation substrates. The driving part of the substrate transportation side has been reduced by 70% compared to the existing system(G6). The width of the movement to the top and bottom when the substrate is transported has been reduced by 80%. As a result, the damage to the substrate is decreased and high transportation stability and device reliability are achieved. Machine height has been greatly reduced, improving overall safety of the tool.

• Positive photoresist (coater/developer)
• CFPhotoresist (coater/developer)
• Organic layer (coater/developer)
• Polyimide (coater)

• Scrubber/Developer unit is spinless-track type
• The coater unit corresponds spinless slit coater
• The flat transfering concept achieves high transportation stability
• Substrate size : <Standard> 1500mm x 1850mm
                                            1950mm x 2250mm
                                            2160mm x 2460mm
                                            2850mm x 3050mm