Tokyo Electron's New Products Promotion (NPP) department provides advanced inspection tools manufactured by top suppliers from around the world. The semiconductor industry's most innovative defect inspection system is the e-beam wafer defect inspection system. The tool provides the best sensitivity and imaging available for improving yields and enabling next generation technologies.

As wafers progress through the manufacturing process, each particular step has the potential to induce defects in the chip's circuitry, thereby reducing the overall yield of chips on a wafer. Electron beam defect inspection helps engineers identify those defects and their mechanisms in order to reduce or eliminate the cause.