The Probus-SiC is a batch tool that handles a variety of substrate sizes, including 3, 4 and 6 inch. The system can accommodate up to two process chambers with an auto-loader, and customer can select the tool configuration according to demanded capacity. In addition to TEL's renowned process performance and reliability, TEL's Probus-SiC features a unique Load Lock, which improves ease of use and lot-to-lot reproducibility.

• SiC Epitaxical film growth on SiC Substrate
• A high-quality epi film is achieved by high reproducibility.
• High throughput & low running cost
• With L/L & vacuum automatic operation transportation mechanism

• *Probus-SiC is a trademark of Tokyo Electron Limited in Japan and other countries.