Tokyo Electron Limited (TEL) today announced the sales launch of the Probus-SiC™, a batch system which forms silicon carbide (SiC) epitaxial films on SiC substrates for use in power semiconductor applications.

The world’s increased focus on “green” technology is creating a demand for highly-efficient power semiconductors to convert and control voltage and current. Silicon carbide substrates have a number of outstanding characteristics over silicon substrates, including a band-gap that is approximately three times greater, insulation breakdown field strength about 10 times greater, and thermal conductivity about three times greater, creating substantial energy savings. These characteristics enable companies to produce compact, ultra-low-loss, high voltage elements in power semiconductors using SiC substrates for electronic devices, automobiles, and other applications.

The core technology used in the Probus-SiC™ is the result of joint research conducted by Kyoto University, Rohm Co., Ltd. and TEL. TEL leveraged its extensive design and manufacturing experience in silicon (Si) semiconductor markets to develop a highly-reliable tool, which can form high-quality epitaxial films with high productivity. The Probus-SiC™ is a batch tool that handles a variety of substrate sizes, including 3, 4 and 6 inch. The system can accommodate up to two process chambers with an auto-loader, and customer can select the tool configuration according to demanded capacity. In addition to TEL’s renowned process performance and reliability, TEL’s Probus-SiC™ features a unique Load Lock, which improves ease of use and lot-to-lot reproducibility.

“In recent years, power semiconductor manufacturers have started to approach the limits of improvements in the performance of power semiconductors using silicon substrates and they have begun development using new materials,” says Shigetoshi Hosaka, executive officer and general manager of the Corporate Development Division. “The Probus-SiC™ provides the process performance, throughput, yields, and flexibility of use necessary to achieve high productivity for mass production with excellent reliability.”

Evaluation equipment has been installed at TEL facilities for domestic and overseas customers. Several advance orders have already been received. The sales of 5-10 tools/year is expected in 3 years.