Tokyo, Japan- July 16, 2007 --- Tokyo Electron Limited (TEL) announced today that the company has shipped its 10,000th vertical batch reactor.

TEL started shipping vertical batch reactors beginning with 150mm substrates and then transitioned to 200mm. With the advent of 300mm and aggressive critical dimension shrinks, TEL introduced three advanced batch reactors, ALPHA-303i, TELFORMULA™ and TELINDY™, to meet those new technology challenges. Working closely with customers, TEL is able to maintain market leadership by continuously introducing innovative core technologies into the company’s product portfolio.

TEL recently released the TELINDY platform. TELINDY is evolutionary, as it draws from the benefits of both the TELFORMULA and the ALPHA-303i by providing a platform that allows for leading edge films to be deposited while maintaining a lower cost of ownership.

Employing multiple reactors, the TELINDY offers a broad spectrum of technologies including, advanced High-k dielectrics in the MLD (Molecular Layer Deposition) reactor and low-temperature dielectric films using a TELINDY-based advanced reactor. TEL’s IRad™ reactor enables the use of plasma enhanced processing in a batch reactor, which breaks the conventional wisdom of plasma enhanced depositions to be limited to single wafer systems only.

“We are very proud of the confidence that our customers place in our batch reactors and this accomplishment is testimony to this feat. TEL will continue to push for paradigm shifts in batch reactor technologies to deliver the solutions needed with the aggressive scaling and the material challenges that faces the industry with a cost competitive solution.” said Hiroshi Takenaka, GM of TEL’s Thermal Processing Systems Business Unit.

About TEL

TEL, established in 1963, is a leading supplier of innovative semiconductor and FPD production equipment worldwide. In Japan, TEL also distributes computer network related products and electronic components of global leading suppliers. To support this diverse product base, TEL is strategically located around the world. TEL is a publicly held company listed on the Tokyo Stock Exchange. www.tel.com


Contact: TEL U.S. Holdings
Michelle Pesez (512) 300-5385
michelle.pesez@us.tel.com