SANTA CLARA, CA July 12, 2007—Timbre Technologies, Inc. today announced the 200th delivery of the company’s ODP (Optical Digital Profilometry) system. It is part of a multi-system order for use in a leading customer’s most advanced production line for next generation devices. Currently, TEL’s customers have ODP systems installed in over 45 fabs at more than 20 customer sites worldwide.

Timbre’s ODP technology provides advanced profile metrology that meets the demanding requirements of CD process control for the 45nm node and below. The ODP solution consists of Timbre’s TeraGen off-line modeling & library generation system and the on-line Profiler Application Server, PAS.
The excellent manufacturability and process capability of Timbre’s ODP products has propelled Timbre into market share leadership for scatterometry applications. The company’s manufacturing-proven solution completes the job of three production metrology tools to provide CDs, profile, and film stack information in one single measurement. ODP uses broadband light to provide non-destructive, high-speed, detailed profiles for a wide range of complex 2D & 3D applications including STI, advanced gates, multiple spacers, deep trenches, contacts, vias, high aspect ratio features, dual damascene, CMP, and mask metrology.

Timbre’s VP of Sales, Jim Hamajima commented, “Our customers are very pleased with the results they have achieved with Timbre’s ODP products over the years. Timbre helps our many users to improve yield and ODP adapts well for high-volume manufacturing. In addition to providing technology and functional advances, the new TeraGen & PAS systems greatly reduce cycle time. Continuing improvements will provide even more advantages to our customers.”
ODP technology allows customers to handle more highly complicated applications and deliver more complex solutions than any competing metrology technology. By increasing ODP’s application base, while decreasing user complexity, Timbre has effectively increased the accessibility and power of scatterometry within the fab.

About Timbre Technologies, Inc.

In production at leading memory and logic device manufacturers around the world, ODP is used in both stand-alone configurations, as well as being integrated into TEL process tools for a wide variety of applications. Timbre’s ODP products are the world market share leader for integrated CD metrology. Their ODP platform, introduced in 2002, has 200 systems in use at memory and logic manufacturers worldwide.

Timbre Technologies, Inc., a wholly owned subsidiary of Tokyo Electron Limited (TEL), develops, manufactures, and markets advanced software solutions for the semiconductor and other solid state industries. www.timbrecom.com

Contact: TEL U.S. Holdings
Michelle Pesez (512) 300-5385
michelle.pesez@us.tel.com