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May 11, 2007

Notice Concerning Payment of Dividends from Surplus Earnings

Tokyo Electron Limited (TEL) announced today that on May 11, 2007, the company’s Board of Directors passed a resolution to pay dividends (year-end dividends) from surplus earnings to shareholders of record as of March 31, 2007

1.Content of Dividend Payments
Amount Most recent dividends forecast Dividends paid in previous fiscal year
Date of shareholder registration March 31, 2007 March 31, 2007 March 31, 2006
Dividends per share 61 yen 50 yen 30 yen
Total dividends paid 10,906 million yen - 5,348 million yen
Date dividends start to be paid June 1, 2007 - June 23, 2006
Source of funds to pay dividends Surplus earnings - Surplus earnings
2.Reason for the upward adjustment
TEL has a basic dividend policy of linking the payment of dividends to business performance and revenue on a continuous basis. It returns benefits to shareholders by aiming for a 20% payout ratio based on consolidated net income for the current period. Since consolidated net income in the consolidated financial results announced today for the fiscal year ended March 31, 2007, showed an increase compared to the expected figures announced on November 14, 2006, the dividends to be paid at the end of the period were adjusted upward. The dividends payout ratio for the consolidated financial results as of March 31, 2007, was 20.1%.

(Reference) Breakdown of Dividends Paid for Year
Shareholder registration date End of interim period End of fiscal year Total annual dividends
Dividends paid in current fiscal year 42 yen 61 yen 103 yen
Dividends paid in previous fiscal year (ended March 2006) 25 yen 30 yen 55 yen
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