Tokyo Electron Limited (TEL) announced that it has decided on the list of candidates for corporate directors and statutory auditors, which will be brought before the 44th General Meeting of Shareholders that will be convened in late June, and that it has determined changes of executives as well. The official decision on these matters will be made at the Annual General Meeting of Shareholders, held on June 22, and a meeting of the Board of Directors, which will be held immediately after that General Meeting of Shareholders. TEL also announced changes in some of its organizations and personnel changes, which will both take effect on June 22.

1. Thirteen Candidates for Corporate Directors
　　Tetsuro Higashi Tetsuo Tsuneishi Kiyoshi Sato
　　Haruo Iwatsu Mamoru Hara Masao Kubodera
　　Yuichi Honda * Hirofumi Kitayama * Hiroshi Takenaka
　　* Kenji Washino * Hikaru Ito Hiroshi Inoue
　　Yasuhiro Tsunemi

Note: Asterisk indicates a candidate for appointment as new director.

Personnel Change of Corporate Director

Name	Continuing Position	New Position	Current Position
Haruo Iwatsu	Corporate Director and Chairman, Tokyo Electron Kyushu Limited	Executive Vice President and General Manager, Development & Manufacturing	SVP、Manufacturing & IT
Masao Kubodera	Corporate Director, Technology & Development	Chairman, Tokyo Electron AT Limited	SVP、Technology & Development
Yuichi Honda	Corporate Director, Finance & Accounting		SVP
Hirofumi Kitayama	General Manager, SPE-3 Division and President & Representative Director, Tokyo Electron Tohoku Limited	Corporate Director and SVP, Development & Manufacturing (Quality)	VP & General Manager
Hiroshi Takenaka	Deputy General Manager, SPE-3 Division /Thermal Processing Systems BUGM	Corporate Director and SVP	VP & General Manager
Kenji Washino	Deputy General Manager, SPE-2 Division /Single Wafer Deposition BUGM	Corporate Director and SVP	VP & General Manager
Hikaru Ito		Corporate Director and SVP and Deputy General Manager, SPE-2 Division /Etching Systems BUGM	VP & General Manager and Deputy General Manager, SPE-1 Division /Clean Track BUGM

2. Candidate for new Statutory Auditor
Mitsutaka Yoshida (currently President & Representative Director, Tokyo Electron Software
Technologies Ltd.)


3. Resignation from Corporate Directors
Kengo Kuroiwa (To be elected as Chairman, Tokyo Electron PS Limited)
Keiichi Furugaki (To be re-elected as Chairman, Tokyo Electron Device Limited)

4. Resignation from Statutory Auditor
Taketoshi Itoyama (To be elected as Chairman & Representative Director, Tokyo Electron Technology Development Institute, Inc.)

5. Partial Organizational Changes effective on June 22, 2007
(1) Technology & Development Division and Manufacturing & IT Division will be abolished, and
Development & Manufacturing Division will be newly established.
(2) MEMS division will be newly established. MEMS Sales Dept. will be newly established under MEMS division and MEMS Business Development Dept. currently under Technology & Development Division will be also under MEMS division.
(3) RLSA division will be newly established. RLSA Sales Dept. will be newly established under RLSA division.
(4) Marketing division will be newly established. Marketing Dept. will be under Marketing division.
(5) Sales & Services, North America & Europe division will be divided in Sales & Services, Europe and Sales & Services, North America.

Name	Continuing Position	New Position	Current Position
Kazushi Tahara		President & Representative Director, Tokyo Electron Software Technologies Limited	VP & General Manager, Tokyo Electron Software Technologies Limited
Takaaki Matsuoka	Fellow	General manager, RLSA and President & Representative Director, Tokyo Electron Technology Development Institute, Inc.	Senior Specialist, RLSA Plasma Project
Makoto Mizokuchi	General Manager, Sales & Services Division	Senior Fellow	SVP, General Manager, Sales & Services, Japan
Masami Akimoto	SVP, Tokyo Electron Kyushu Limited	SVP, General Manager, Development
Akira Miura	General Manager, SPE-1 Division and President & Representative Director, Tokyo Electron Kyushu Limited		VP & General Manager
Kozo Hara	General Manager, SPE-2 Division and President & Representative Director, Tokyo Electron AT Limited		VP & General Manager
Tsuyoshi Aruga	General Manager, SPE-4 Division and President & Representative Director, Tokyo Electron TS Limited		VP & General Manager
Takashi Ito		SVP and Deputy General Manager, SPE-1 Division /Clean Track BU	VP & General Manager and Deputy General Manager, SPE-2 Division /Etching Systems BU
Yoshikazu Nunokawa	VP & General Manager, HR and Finance		Director, Personnel Dept.
Hideyuki Tsutsumi		VP & General Manager, Sales & Services, Japan	Director, Thermal Processing Systems Business Planning Dept.
Kiyoshi Sunohara	VP & General Manager	General Manager, Marketing	General Manager, Sales & Services, North America & Europe
Yoichi Ishikawa		EVP, TEL Epion, Inc.	VP & General Manager, Marketing and Director, Marketing Dept.
Yoshinori Inoue		VP & General Manager, MEMS	Deputy General Manager, Sales & Services, Japan (West Japan) and General Manager, Kyushu Branch Office
Shigetoshi Hosaka	VP & General Manager, Technology & Development Center, Leading edge Process Development Center and Director, Technology & Development Center	In charge of Development Planning Dept. and Director, Development Planning Dept.
Hiroshi Tomita		Senior Specialist、MEMS	VP & General Manager, MEMS Business
Takeo Sasaki	Director (Europe), Sales & Services, Europe	General Manager, Sales & Services, Europe	Director (Europe), Sales & Services, North America & Europe
Koki Shirai	Director (North America), Sales & Services, North America	General Manager, Sales & Services, North America	Director (North America), Sales & Services, North America & Europe
Toshiki Kawai		Director, Thermal Processing Systems Business Planning Dept.	Senior manager, Thermal Processing Systems Business Planning Dept.
Hiroshi Ishida		Director, Marketing Dept.	Director, Intellectual Property Dept.
Tetsuro Hori	Director, Legal Dept.	Director, Intellectual Property Dept.
Hikaru Oikawa		Director, AIM Dept.	Senior Manager, AIM Dept.
Satoshi Saito		Senior Specialist, Environment Health & Safety Center	Director, AIM Dept.
Naozo Sugimoto		Director, MEMS Sales Dept.	Director, Sales & Services, Japan Accounts
Hitoshi Mizusugi		Director, RLSA Sales Dept.	RLSA Plasma Project
Masayuki Tomoyasu		SVP, TEL Technology Center, America, LLC	Director, Development Planning Dept.
Kenji Hotta		Director, Personnel Dept.	Director, Order Process Dept.
Hideaki Komi		Director, Order Process Dept.	Senior Manager, Order Process Dept.
Hironori Morikawa	Director, Sales & Services, Japan Accounts	General Manager, Kyushu Branch Office
Hiroaki Miyatake		VP & General Manager, Tokyo Electron Software Technologies Limited	Deputy General Manager, Sales & Services, Japan (East Japan)