The following changes in the company organization and important personnel will become effective on April 1st, 2007.

1. Partial Changes in the Organization (Effective on April 1st)

(1) Post Sales will become independent from Sales & Services Division.
(2) The Human Resource Development Center under the Administration will be under direct control of the Chairman & CEO and President & COO.

2. Important Personnel Changes (Effective on April 1st)

Hiroki Takebuchi
(New) SVP, Corporate Strategic Planning Dept. and Human Resources Development Center
(Now) SVP, Corporate Strategic Planning Dept.

Yoshikazu Nunokawa
(New) VP & General Manager, HR and Finance and Director, Personnel Dept.
(Now) VP & General Manager, HR, Human Resources Development Center and Finance

Shigetoshi Hosaka
(New) VP & General Manager, Technology & Development Center, Leading edge
Process Development Center
(Now) VP & General Manager, Technology & Development Center, Development
Planning

Tetsuhiko Furuya
(New) Tokyo Electron AT Limited.
(Now) Director, Personnel Dept.