(Effective on October 1, 2006)

Kengo Kuroiwa
(New) Corporate Director
(Now) Corporate Director, Manufacturing
       and SVP, Manufacturing & IT

Haruo Iwatsu
(New) Corporate Director, Manufacturing
       and SVP, Manufacturing & IT
       and Chairman, Tokyo Electron Kyushu Ltd.
(Now) Corporate Director, SVP, General Manager, SPE-1 Division.
       and President & Representative Director, Tokyo Electron Kyushu Ltd.
       and Chairman, Tokyo Electron Taiwan Ltd.

Akira Miura
(New) VP & General Manager, SPE-1 Division.
       and President & Representative Director, Tokyo ElectronKyushu Ltd.
       and Chairman, Tokyo Electron Taiwan Ltd.
(Now) SVP, Tokyo Electron Kyushu Ltd.

Noriyuki Kuga
(New) EVP, Tokyo Electron Device Ltd
(Now) President & Representative Director, Tokyo Electron BP Ltd.
       and General Manager, Fuchu Technology Center

Takayoshi Ida
(New) President & Representative Director, Tokyo Electron BPLtd.
       and General Manager, Fuchu Technology Center
(Now) VP & General Manager, Tokyo Electron FE Ltd.

Katsuyuki Amano
(New) VP & General Manager, Tokyo Electron Device Ltd.
(Now) VP & General Manager, Computer Network Division.

Tatsuzo Kawaguchi
(New) Senior Director, Tokyo Electron AT Ltd.
(Now) Senior Director, Corporate Process Integration