WaferMasters, Inc. and Tokyo Electron Limited (TEL) announced today that the intellectual property rights for Single Wafer Rapid Thermal Furnace (SRTF) technology, previously jointly owned by WaferMasters and TEL, will now belong exclusively to WaferMasters, Inc. WaferMasters further will have the exclusive right to manufacture and sell the WaferMasters' SRTF technology and platforms. TEL is exiting the single-wafer rapid thermal processing (SRTF) business, and will focus on the company's other core technologies.

WaferMasters and TEL are discussing a customer service and support agreement for current SRTF customers.