AUSTIN, TEXAS-Tokyo Electron (TEL), today announced their participation in Albany NanoTech's new 300mm semiconductor research center at a press conference held on the campus of the University at Albany-State University of New York (UAlbany). TEL, the world's second largest supplier of semiconductor manufacturing equipment, has agreed to participate in the new center through a joint TEL-Albany NanoTech program, which is expected to generate more than $300 million in spending over seven years and support more than 300 research jobs. TEL's participation with Albany NanoTech is complementary to its current and future activities in Austin, Boston and Phoenix.

The new NanoTech center will allow advanced semiconductor material and process research to be performed on 300mm equipment rather than laboratory scale systems, which will shorten the time from research and development to production. The center will be housed in two 300mm wafer cleanroom buildings. The first of these buildings is nearing completion and will begin operations in late 2003. Once both buildings are completed, they will house a fully-integrated semiconductor fabrication line capable of developing materials and processes for advanced semiconductor devices at the 45nm generation and beyond.

TEL's participation in the Albany NanoTech project will provide them with significant opportunities to collaborate with leading industry companies, as well as the highly respected researchers from NanoTech. At this time, the exact details of TEL's participation in the Albany Initiative have not been finalized, but will include the installation of TEL tools at the facility, placement of TEL researchers and engineers, and joint leadership on a variety of advanced research projects. The new program will supplement TEL's global internal research and development activities and will complement its participation in leading industry consortia, such as International SEMATECH, SELETE and IMEC.

Tetsuro Higashi, CEO, president TEL said, "TEL is very pleased with the opportunity to participate in Albany NanoTech's 300mm research facility. As a global leader in the semiconductor equipment industry, we constantly strive to find new and innovative ways to advance the science of semiconductor fabrication. By participating in this center, we will significantly enhance our internal development efforts, ultimately allowing us to shorten the time required to bring critical technology from the research lab to the production floor. This exemplifies our commitment to providing our customers with production-worthy, enabling technology according to the requirements and timing of their roadmaps."