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May 10, 2002

Announcement Regarding Stock Repurchase

The board meeting of Tokyo Electron Limited held today voted to propose a stock repurchase program based on Article 210 of Japanese Commercial Code to the Fiscal Year 2002 (the 39th FY) Annual Shareholders Meeting planned to be held on June 21 2002.

1. Reason of repurchase: Enable implementation of flexible and swift investment policy responding to business environment.
2. Detail:
(1) Kind of stock to be acquired: Common stock
(2) Total number of shares to be acquired: Not more than 5,000,000
(2.8% of total issued shares)
(3) Total value of stock to be acquired: Not more than 50 billion yen

*Note: Above program requires approval at the Fiscal Year 2002 (the 39th FY) Annual Shareholders Meeting planned to be held on June 21 2002 for actual implementation.

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